OA

Oliver Ache

KL Kla-Tencor: 3 patents #442 of 1,394Top 35%
KL Kla: 1 patents #347 of 758Top 50%
Overall (All Time): #1,115,734 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12100574 Target and algorithm to measure overlay by modeling back scattering electrons on overlapping structures Nadav Gutman, Carey Phelps 2024-09-24
10337852 Method for measuring positions of structures on a substrate and computer program product for determining positions of structures on a substrate Frank Laske 2019-07-02
9704238 Method for correcting position measurements for optical errors and method for determining mask writer errors Stefan Eyring, Frank Laske 2017-07-11
9201312 Method for correcting position measurements for optical errors and method for determining mask writer errors Stefan Eyring, Frank Laske 2015-12-01