Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100574 | Target and algorithm to measure overlay by modeling back scattering electrons on overlapping structures | Nadav Gutman, Carey Phelps | 2024-09-24 |
| 10337852 | Method for measuring positions of structures on a substrate and computer program product for determining positions of structures on a substrate | Frank Laske | 2019-07-02 |
| 9704238 | Method for correcting position measurements for optical errors and method for determining mask writer errors | Stefan Eyring, Frank Laske | 2017-07-11 |
| 9201312 | Method for correcting position measurements for optical errors and method for determining mask writer errors | Stefan Eyring, Frank Laske | 2015-12-01 |