| 11862475 |
Gas mixer to enable RPS purging |
Diwakar Kedlaya, Amit Kumar BANSAL, Venkata Sharat Chandra Parimi, Rajaram Narayanan, Badri Narayan Ramamurthi +3 more |
2024-01-02 |
| 11848178 |
Optical absorption sensor for semiconductor processing |
Diwakar Kedlaya |
2023-12-19 |
| 11814716 |
Faceplate having blocked center hole |
Prashant Kumar Kulshreshtha, Jiheng Zhao, Diwakar Kedlaya |
2023-11-14 |
| 11810764 |
Faceplate with edge flow control |
Prashant Kumar Kulshreshtha, Rajaram Narayanan, Diwakar Kedlaya |
2023-11-07 |
| 11804363 |
Chamber components for gas delivery modulation |
Diwakar Kedlaya, Truong Van Nguyen, Mingle Tong, Sherry L. Mings, Venkata Sharat Chandra Parimi |
2023-10-31 |
| 11798820 |
Gas delivery systems and methods |
Diwakar Kedlaya, Zubin Huang, Ganesh Balasubramanian, Kaushik Alayavalli, Martin Jay Seamons +3 more |
2023-10-24 |
| 11682544 |
Cover wafer for semiconductor processing chamber |
Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Diwakar Kedlaya, Amit Kumar BANSAL |
2023-06-20 |
| 11613808 |
Clean processes for boron carbon film deposition |
Jiheng Zhao, Abdul Aziz Khaja, Prashant Kumar Kulshreshtha |
2023-03-28 |
| 11430641 |
Processing systems and methods to control process drift |
Vivien Chua, Prashant Kumar Kulshreshtha, Zhijun Jiang, Diwakar Kedlaya |
2022-08-30 |
| 11009455 |
Precursor delivery system and methods related thereto |
Zubin Huang, Sarah White, Jonathan Bakke, Diwakar Kedlaya, Juan Carlos Rocha |
2021-05-18 |
