Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12104253 | Techniques for controlling precursors in chemical deposition processes | Elaina Babayan, Sarah White, Vijay Venugopal | 2024-10-01 |
| 11959168 | Solid source precursor vessel | Jianqiu Huang, Ankit Kimtee, Sudhanshu Biyani, Eric James Shero | 2024-04-16 |
| 11718914 | Techniques for controlling precursors in chemical deposition processes | Elaina Babayan, Sarah White, Vijay Venugopal | 2023-08-08 |
| 11009455 | Precursor delivery system and methods related thereto | Zubin Huang, Sarah White, Diwakar Kedlaya, Juan Carlos Rocha, Fang Ruan | 2021-05-18 |
| 10822699 | Techniques for controlling precursors in chemical deposition processes | Elaina Babayan, Sarah White, Vijay Venugopal | 2020-11-03 |
| 9947578 | Methods for forming low-resistance contacts through integrated process flow systems | Yu Lei, Vikash Banthia, Kai Wu, Xinyu Fu, Yi Xu +9 more | 2018-04-17 |
| 9595466 | Methods for etching via atomic layer deposition (ALD) cycles | Xinyu Fu, Srinivas Gandikota, Mei Chang, Seshadri Ganguli, Guoqiang Jian +2 more | 2017-03-14 |