Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468288 | Methods and systems for chucking a warped wafer | Aviv Balan, Savita Chandan, Chia-Chu Chen, Teck Meriam | 2019-11-05 |
| 10381256 | Apparatus and method for chucking warped wafers | Pradeep Subrahmanyan, Chris Pohlhammer | 2019-08-13 |
| 9960070 | Chucking warped wafer with bellows | — | 2018-05-01 |
| 9653338 | System and method for non-contact wafer chucking | — | 2017-05-16 |