Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9245714 | System and method for compressed data transmission in a maskless lithography system | — | 2016-01-26 |
| 9214344 | Pillar-supported array of micro electron lenses | Alan D. Brodie, Yehiel Gotkis, Leonid Baranov | 2015-12-15 |
| 9081287 | Methods of measuring overlay errors in area-imaging e-beam lithography | Walter D. Mieher | 2015-07-14 |
| 8893059 | Pattern data system for high-performance maskless electron beam lithography | — | 2014-11-18 |
| 8373144 | Quasi-annular reflective electron patterning device | Mark A. McCord, Paul F. Petric | 2013-02-12 |
| 7958464 | Electron beam patterning | Luca Grella | 2011-06-07 |
| 7696498 | Electron beam lithography method and apparatus using a dynamically controlled photocathode | — | 2010-04-13 |
| 7369217 | Method and device for immersion lithography | — | 2008-05-06 |
| 6436607 | Border modification for proximity effect correction in lithography | Richard L. Lozes, Andrew J. Muray | 2002-08-20 |
| 4788431 | Specimen distance measuring system | William A. Eckes, Lee H. Veneklasen, Glen E. Howard, Donald J. McCarthy, Daniel L. Cavan | 1988-11-29 |
| 4498010 | Virtual addressing for E-beam lithography | Charles S. Biechler, Richard E. Graves, Steven A. Lyons | 1985-02-05 |