Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7518732 | Multi-axis interferometer system using independent, single axis interferometers | Jeffrey Sullivan, Kurt Werder | 2009-04-14 | |
| 7470919 | Substrate support assembly with thermal isolating plate | Yacov Elgar, Patrick Duane, Rushford Ogden | 2008-12-30 | $19,931,000 |
| 7345287 | Cooling module for charged particle beam column elements | Thomas Jasinski, Dieter Winkler | 2008-03-18 | $36,315,000 |
| 7336369 | Multi-axis interferometer system using independent, single axis interferometers | Jeffrey Sullivan, Kurt Werder | 2008-02-26 | $21,345,000 |
| 6219146 | Laser reflector alignment | Robert A. Innes | 2001-04-17 | |
| 5209402 | Laminar flow gas diffuser | Daniel B. DeBra | 1993-05-11 | |
| 4788431 | Specimen distance measuring system | Lee H. Veneklasen, Glen E. Howard, Donald J. McCarthy, Allen M. Carroll, Daniel L. Cavan | 1988-11-29 | |
| 4412133 | Electrostatic cassette | Russell H. Rhoades, John W. Vorreiter, John C. Wiesner, Charles E. Shepard | 1983-10-25 |