Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837803 | Inspection system with grounded capacitive sample proximity sensor | Yang Xie, Feilong Lin | 2020-11-17 |
| 7470919 | Substrate support assembly with thermal isolating plate | Yacov Elgar, Patrick Duane, William A. Eckes | 2008-12-30 |