Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7470919 | Substrate support assembly with thermal isolating plate | Yacov Elgar, William A. Eckes, Rushford Ogden | 2008-12-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7470919 | Substrate support assembly with thermal isolating plate | Yacov Elgar, William A. Eckes, Rushford Ogden | 2008-12-30 |