Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978270 | Charged particle beam device, interchangeable multi-aperture arrangement for a charged particle beam device, and method for operating a charged particle beam device | Dieter Winkler | 2021-04-13 |
| 8502163 | Charged particle beam device, vacuum valve therefor and operation thereof | — | 2013-08-06 |
| 8101922 | Modular gas ion source | Dieter Winkler, Udo Weigel | 2012-01-24 |
| 8044370 | Gas ion source with high mechanical stability | Dieter Winkler | 2011-10-25 |
| 7355186 | Charged particle beam device with cleaning unit and method of operation thereof | — | 2008-04-08 |
| 7345287 | Cooling module for charged particle beam column elements | Dieter Winkler, William A. Eckes | 2008-03-18 |
| 7278474 | Heat exchanger | Javier A. Valenzuela | 2007-10-09 |
| 5881208 | Heater and temperature sensor array for rapid thermal processing thermal core | Franz T. Geyling | 1999-03-09 |
| 5847399 | Deflection system | Reinhold Schmitt, Stefan Lanio | 1998-12-08 |
| 5689077 | Musical score display and audio system | — | 1997-11-18 |
| 4597949 | Apparatus for growing crystals | August F. Witt | 1986-07-01 |