Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772478 | Catadioptric projection objective with parallel, offset optical axes | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple | 2017-09-26 |
| 8908269 | Immersion catadioptric projection objective having two intermediate images | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple +2 more | 2014-12-09 |
| 8804234 | Catadioptric projection objective including an aspherized plate | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple | 2014-08-12 |
| 8730572 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple +2 more | 2014-05-20 |
| 8534838 | Optical coherence reflectometry with depth resolution | Roland Barth, Roland Bergner, Wilfried Bissmann, Martin Hacker, Ingo Koschmieder +3 more | 2013-09-17 |
| 8355201 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple +2 more | 2013-01-15 |
| 8339701 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple | 2012-12-25 |
| 8307832 | Method and device for increasing an optical system focal depth | Eckhard Schroeder, Matthias Wottke | 2012-11-13 |
| 8289619 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple | 2012-10-16 |
| 8208199 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple +2 more | 2012-06-26 |
| 7950398 | Method and device for increasing an optical system focal depth | Eckhard Schroeder, Matthias Wottke | 2011-05-31 |
| 7869122 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple | 2011-01-11 |
| 7791711 | Projection method including pupillary filtering and a projection lens therefor | Hubert Holderer, Christian Hembd-Soellner, Ulrich Haag | 2010-09-07 |
| 7679821 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple | 2010-03-16 |
| 7672047 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple | 2010-03-02 |
| 7463422 | Projection exposure apparatus | Vladimir Kamenow, Daniel Kraehmer, Michael Totzeck, Toralf Gruner, Aurelian Dodoc +4 more | 2008-12-09 |
| 7385756 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann, Alexander Epple | 2008-06-10 |
| 7336342 | Projection method including pupillary filtering and a projection lens therefor | Hubert Holderer, Christian Hembd-Soellner, Ulrich Haag | 2008-02-26 |
| 7031069 | Microlithographic illumination method and a projection lens for carrying out the method | Toralf Gruner, Manfred Maul | 2006-04-18 |
| 6728043 | Microlithographic illumination method and a projection lens for carrying out the method | Toralf Gruner, Manfred Maul | 2004-04-27 |