Issued Patents All Time
Showing 26–50 of 133 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8339701 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple | 2012-12-25 |
| 8317345 | Catoptric objectives and systems using catoptric objectives | Hans-Juergen Mann, Wilhelm Ulrich | 2012-11-27 |
| 8289619 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple | 2012-10-16 |
| 8208198 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple +2 more | 2012-06-26 |
| 8208199 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple +2 more | 2012-06-26 |
| 8199400 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple +2 more | 2012-06-12 |
| 8004755 | Catoptric objectives and systems using catoptric objectives | Hans-Juergen Mann, Wilhelm Ulrich | 2011-08-23 |
| 7869122 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple | 2011-01-11 |
| 7869121 | Small ultra-high NA catadioptric objective using aspheric surfaces | J. Joseph Armstrong, Yung-Ho Alex Chuang | 2011-01-11 |
| 7859748 | Microlithographic reduction projection catadioptric objective | Russell Hudyma, Wilhelm Ulrich | 2010-12-28 |
| 7773296 | Ultra-broadband UV microscope imaging system with wide range zoom capability | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai | 2010-08-10 |
| RE41350 | Catadioptric objective comprising two intermediate images | Alois Herkommer, Karl-Heinz Schuster, Gerd Füerter, Rudolph Von Büenau, Wilhelm Ulrich | 2010-05-25 |
| 7712905 | Imaging system with mirror group | Aurelian Dodoc, Alexander Epple, Hans-Juergen Mann | 2010-05-11 |
| 7697211 | Symmetrical objective having four lens groups for microlithography | Aurelian Dodoc, Johannes Zellner, Heiko Feldmann, Wilhelm Ulrich, Holger Walter +3 more | 2010-04-13 |
| 7697198 | Catadioptric projection objective | Alexander Epple, Aurelian Dodoc, Wilhelm Ulrich, Karl-Heinz Schuster | 2010-04-13 |
| 7682031 | Catoptric objectives and systems using catoptric objectives | Hans-Jurgen Mann, Wilhelm Ulrich | 2010-03-23 |
| 7679842 | High performance catadioptric imaging system | Yung-Ho Alex Chuang, J. Joseph Armstrong | 2010-03-16 |
| 7679821 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple | 2010-03-16 |
| 7672043 | Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth | J. Joseph Armstrong, Yung-Ho Alex Chuang | 2010-03-02 |
| 7672047 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple | 2010-03-02 |
| 7646533 | Small ultra-high NA catadioptric objective | Yung-Ho Alex Chuang, J. Joseph Armstrong | 2010-01-12 |
| 7639419 | Inspection system using small catadioptric objective | Yung-Ho Alex Chuang, J. Joseph Armstrong | 2009-12-29 |
| 7633675 | Catadioptric imaging system employing immersion liquid for use in broad band microscopy | J. Joseph Armstrong, Yung-Ho Alex Chuang | 2009-12-15 |
| 7573655 | Unit magnification projection objective | — | 2009-08-11 |
| 7518789 | Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system | Yung-Ho Alex Chuang, J. Joseph Armstrong | 2009-04-14 |