Issued Patents All Time
Showing 76–100 of 133 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930837 | Optical projection lens system | Wilhelm Ulrich | 2005-08-16 |
| 6912042 | 6-mirror projection objective with few lenses | — | 2005-06-28 |
| 6903802 | Projection objective having adjacently mounted aspheric lens surfaces | Karl-Heinz Schuster, Wilhelm Ulrich, Helmut Beierl, Wolfgang Singer | 2005-06-07 |
| 6873476 | Microlithographic reduction projection catadioptric objective | — | 2005-03-29 |
| 6842298 | Broad band DUV, VUV long-working distance catadioptric imaging system | Yung-Ho Alex Chuang | 2005-01-11 |
| 6801358 | Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system | Yung-Ho Alex Chuang, J. Joseph Armstrong | 2004-10-05 |
| 6801357 | Ultra-broadband UV microscope imaging system with wide range zoom capability | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai | 2004-10-05 |
| 6791761 | Optical projection lens system | Wilhelm Ulrich | 2004-09-14 |
| 6717722 | Catadioptric optical system and exposure apparatus having the same | Helmut Beierl, Gerhard Furter, Karl-Heinz Schuster, Wilhelm Ulrich | 2004-04-06 |
| 6665126 | Projection exposure lens with aspheric elements | Wilhelm Ulrich, Helmut Beierl | 2003-12-16 |
| 6646718 | Projection objective having adjacently mounted aspheric lens surfaces | Karl-Heinz Schuster, Wilhelm Ulrich, Helmut Beierl, Wolfgang Singer | 2003-11-11 |
| 6636350 | Microlithographic reduction projection catadioptric objective | Russell Hudyma, Wilhelm Ulrich | 2003-10-21 |
| 6600608 | Catadioptric objective comprising two intermediate images | Alois Herkommer, Karl-Heinz Schuster, Gerd Furter, Rudolf Von Bünau, Wilhelm Ulrich | 2003-07-29 |
| 6590715 | Optical projection system | Wilhelm Ulrich | 2003-07-08 |
| 6560011 | High NA system for multiple mode imaging | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, J. Joseph Armstrong | 2003-05-06 |
| 6560031 | Optical projection lens system | Wilhelm Ulrich | 2003-05-06 |
| 6512631 | Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system | Yung-Ho Alex Chuang, J. Joseph Armstrong | 2003-01-28 |
| 6496306 | Catadioptric optical system and exposure apparatus having the same | Helmut Beierl, Gerhard Furter, Karl-Heinz Schuster, Wilhelm Ulrich | 2002-12-17 |
| 6483638 | Ultra-broadband UV microscope imaging system with wide range zoom capability | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai | 2002-11-19 |
| 6392793 | High NA imaging system | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, J. Joseph Armstrong | 2002-05-21 |
| 6362923 | Lens for microscopic inspection | Steve R. Lange | 2002-03-26 |
| 6313467 | Broad spectrum ultraviolet inspection methods employing catadioptric imaging | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai | 2001-11-06 |
| 6262836 | High numerical aperture ring field projection system for extreme ultraviolet lithography | Russell Hudyma | 2001-07-17 |
| 6262826 | Reflective optical imaging method and circuit | — | 2001-07-17 |
| 6210865 | Extreme-UV lithography condenser | William C. Sweatt, Donald W. Sweeney, James P. McGuire | 2001-04-03 |