Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6600608 | Catadioptric objective comprising two intermediate images | David Shafer, Alois Herkommer, Karl-Heinz Schuster, Rudolf Von Bünau, Wilhelm Ulrich | 2003-07-29 |
| 6590718 | Projection exposure system having a reflective reticle | Christian Wagner, Uwe Gödecke, Henriette Müller | 2003-07-08 |
| 6512573 | Projection exposure apparatus and exposure method | — | 2003-01-28 |
| 5982558 | REMA objective for microlithographic projection exposure systems | Johannes Wangler, Udo Dinger, Gerhard Ittner | 1999-11-09 |
| 5880891 | High-resolution high-apertured objective | — | 1999-03-09 |
| 5742436 | Maximum aperture catadioptric reduction objective for microlithography | — | 1998-04-21 |
| 5402267 | Catadioptric reduction objective | Wilhelm Ulrich | 1995-03-28 |
| 5289316 | Measuring objective | — | 1994-02-22 |