Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6285443 | Illuminating arrangement for a projection microlithographic apparatus | Johannes Wangler | 2001-09-04 |
| 5982558 | REMA objective for microlithographic projection exposure systems | Gerd Furter, Johannes Wangler, Udo Dinger | 1999-11-09 |
| 5572287 | Illuminating arrangement for a projection microlithographic exposure apparatus | Johannes Wangler | 1996-11-05 |