Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7002694 | Interferometer system and method for recording an interferogram using weighted averaging over multiple frequencies, and method for providing and manufacturing an object having a target surface | Stefan Schulte, Bernd Dörband, Wolfgang Kähler | 2006-02-21 |
| 6590718 | Projection exposure system having a reflective reticle | Gerd Furter, Christian Wagner, Uwe Gödecke | 2003-07-08 |