Issued Patents All Time
Showing 51–75 of 133 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7511890 | Refractive optical imaging system, in particular projection objective for microlithography | Wilhelm Ulrich, Dieter Bader, Alexander Epple | 2009-03-31 |
| 7502177 | Broad band DUV, VUV long-working distance catadioptric imaging system | Yung-Ho Alex Chuang | 2009-03-10 |
| 7474469 | Arrangement of optical elements in a microlithographic projection exposure apparatus | Michael Totzeck, Gerhart Fuerter, Olaf Dittmann, Karl-Heinz Schuster, Susanne Beder +1 more | 2009-01-06 |
| 7474461 | Broad band objective having improved lateral color performance | Yung-Ho Alex Chuang, J. Joseph Armstrong | 2009-01-06 |
| 7463422 | Projection exposure apparatus | Vladimir Kamenow, Daniel Kraehmer, Michael Totzeck, Toralf Gruner, Aurelian Dodoc +4 more | 2008-12-09 |
| 7457034 | High NA system for multiple mode imaging | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, J. Joseph Armstrong | 2008-11-25 |
| 7450312 | Optical projection lens system | Wilhelm Ulrich | 2008-11-11 |
| 7428105 | Objectives as a microlithography projection objective with at least one liquid lens | Susanne Beder, Karl-Heinz Schuster, Wolfgang Singer | 2008-09-23 |
| 7426082 | Catadioptric projection objective with geometric beam splitting | Alexander Epple, Aurelian Dodoc, Helmut Beierl, Wilhelm Ulrich | 2008-09-16 |
| 7423805 | Ultra-broadband UV microscope imaging system with wide range zoom capability | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai | 2008-09-09 |
| 7385756 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple | 2008-06-10 |
| 7385764 | Objectives as a microlithography projection objective with at least one liquid lens | Susanne Beder, Karl-Heinz Schuster, Wolfgang Singer | 2008-06-10 |
| 7307783 | Catadioptric imaging system employing immersion liquid for use in broad band microscopy | J. Joseph Armstrong, Yung-Ho Alex Chuang | 2007-12-11 |
| 7245438 | Broad band objective having improved lateral color performance | Yung-Ho Alex Chuang, J. Joseph Armstrong | 2007-07-17 |
| 7218453 | Projection system, in particular for a microlithographic projection exposure apparatus | — | 2007-05-15 |
| 7218445 | Microlithographic reduction projection catadioptric objective | Russell Hudyma, Wilhelm Ulrich | 2007-05-15 |
| 7180658 | High performance catadioptric imaging system | Yung-Ho Alex Chuang, J. Joseph Armstrong | 2007-02-20 |
| 7154678 | Projection objective having adjacently mounted aspheric lens surfaces | Karl-Heinz Schuster, Wilhelm Ulrich, Helmut Beierl, Wolfgang Singer | 2006-12-26 |
| 7136220 | Catadioptric reduction lens | Wilhelm Ulrich, Alexander Epple, Helmut Beierl, Aurelian Dodoc | 2006-11-14 |
| 7136234 | Broad band DUV, VUV long-working distance catadioptric imaging system | Yung-Ho Alex Chuang | 2006-11-14 |
| 7046459 | Catadioptric reductions lens | Alexander Epple | 2006-05-16 |
| 7035001 | High NA system for multiple mode imaging | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, J. Joseph Armstrong | 2006-04-25 |
| 6995930 | Catadioptric projection objective with geometric beam splitting | Alexander Epple, Aurelian Dodoc, Helmut Beierl, Wilhelm Ulrich | 2006-02-07 |
| 6985286 | Catadioptric optical system and exposure apparatus having the same | Helmut Beierl, Gerhard Furter, Karl-Heinz Schuster, Wilhelm Ulrich | 2006-01-10 |
| 6956694 | Broad spectrum ultraviolet inspection systems employing catadioptric imaging | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai | 2005-10-18 |