Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7474469 | Arrangement of optical elements in a microlithographic projection exposure apparatus | Michael Totzeck, Olaf Dittmann, Karl-Heinz Schuster, David Shafer, Susanne Beder +1 more | 2009-01-06 |