Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085780 | Optical system, heating arrangement, and method for heating an optical element in an optical system | Andrea Berner, André DIRAUF, Hans-Michael Stiepan, Peter Klopfleisch | 2024-09-10 |
| 11119413 | Imaging optical unit for imaging an object field into an image field | Johannes Ruoff, Hans-Juergen Rostalski, Alexander Wolf | 2021-09-14 |
| 10606048 | Imaging optical unit for a metrology system for examining a lithography mask | Johannes Ruoff, Ralf Müller, Ulrich Matejka, Hans-Jurgen Mann, Jens Timo Neumann | 2020-03-31 |
| 9459539 | Imaging optical unit for a projection exposure apparatus | Hans-Juergen Mann, Christoph Menke | 2016-10-04 |
| 9164396 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2015-10-20 |
| 8908269 | Immersion catadioptric projection objective having two intermediate images | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2014-12-09 |
| 8730572 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2014-05-20 |
| 8416490 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2013-04-09 |
| 8355201 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2013-01-15 |
| 8325426 | Projection objective of a microlithographic projection exposure apparatus | Karl-Heinz Schuster, Heiko Feldmann, Toralf Gruner, Michael Totzeck, Wilfried Clauss +2 more | 2012-12-04 |
| 8319944 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2012-11-27 |
| 8208198 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2012-06-26 |
| 8208199 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2012-06-26 |
| 8199400 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann +2 more | 2012-06-12 |
| 8068276 | Projection objective for lithography | Heiko Feldmann, Aurelian Dodoc, Alexander Epple, Hans-Juergen Rostalski | 2011-11-29 |
| 8031326 | Illumination system or projection lens of a microlithographic exposure system | Michael Totzeck, Wilfried Clauss, Heiko Feldmann, Daniel Kraehmer, Aurelian Dodoc | 2011-10-04 |
| 7982969 | Projection objective of a microlithographic projection exposure apparatus | Karl-Heinz Schuster, Heiko Feldmann, Toralf Gruner, Michael Totzeck, Wilfried Clauss +2 more | 2011-07-19 |
| 7848031 | Hologram and method of manufacturing an optical element using a hologram | Jochen Hetzler, Heiko Feldmann | 2010-12-07 |
| 7835073 | Projection objective for lithography | Heiko Feldmann, Aurelian Dodoc, Alexander Epple, Hans-Juergen Rostalski | 2010-11-16 |
| 7782440 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2010-08-24 |
| 7782538 | Projection objective having a high aperture and a planar end surface | Wolfgang Singer, Karl-Heinz Schuster | 2010-08-24 |
| 7728987 | Method of manufacturing an optical element | Ralf Arnold, Bernd Dörband, Frank Schillke | 2010-06-01 |
| 7719658 | Imaging system for a microlithographical projection light system | Andreas Dorsel, Toralf Gruner, Bernhard Kneer, Alexander Epple, Norbert Wabra | 2010-05-18 |
| 7710640 | Projection objective of a microlithographic projection exposure apparatus | Daniel Kraehmer, Heiko Feldmann | 2010-05-04 |
| 7589903 | Projection objective adapted for use with different immersion fluids or liquids, method of conversion of such and production method | Wilhelm Ulrich, Heiko Feldmann, Wolfgang Singer, Toralf Gruner | 2009-09-15 |