Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7570343 | Microlithographic projection exposure apparatus | Aurelian Dodoc, Karl-Heinz Schuster, Joerg Mallmann, Wilhelm Ulrich, Hans-Juergen Rostalski +6 more | 2009-08-04 |
| 7474469 | Arrangement of optical elements in a microlithographic projection exposure apparatus | Michael Totzeck, Gerhart Fuerter, Olaf Dittmann, Karl-Heinz Schuster, David Shafer +1 more | 2009-01-06 |
| 7466489 | Projection objective having a high aperture and a planar end surface | Wolfgang Singer, Karl-Heinz Schuster | 2008-12-16 |
| 7428105 | Objectives as a microlithography projection objective with at least one liquid lens | David Shafer, Karl-Heinz Schuster, Wolfgang Singer | 2008-09-23 |
| 7385764 | Objectives as a microlithography projection objective with at least one liquid lens | David Shafer, Karl-Heinz Schuster, Wolfgang Singer | 2008-06-10 |
| 7301707 | Projection optical system and method | Dave Shafer | 2007-11-27 |
| 7061626 | Method of manufacturing an optical element using a hologram | Frank Schillke, Jochen Hetzler | 2006-06-13 |