Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10558126 | Lithographic apparatus and method | Jan Bernard Plechelmus Van Schoot, Sascha Migura | 2020-02-11 |
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2019-07-09 |
| 9696631 | Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system | Markus Deguenther, Toralf Gruner | 2017-07-04 |
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2016-09-06 |
| 9086637 | Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system | Markus Deguenther, Toralf Gruner | 2015-07-21 |
| 8330935 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2012-12-11 |
| 7719658 | Imaging system for a microlithographical projection light system | Andreas Dorsel, Toralf Gruner, Susanne Beder, Alexander Epple, Norbert Wabra | 2010-05-18 |
| 7605905 | Method for distortion correction in a microlithographic projection exposure apparatus | Andreas Kirchner, Hans-Jurgen Mann | 2009-10-20 |
| 7522260 | Method for correcting astigmatism in a microlithography projection exposure apparatus, a projection objective of such a projection exposure apparatus, and a fabrication method for micropatterned components | Andreas Kirchner, Hans-Juergen Mann | 2009-04-21 |
| 7457043 | Projection exposure system | Gerald Richter | 2008-11-25 |
| 7408621 | Projection exposure system | Gerald Richter | 2008-08-05 |
| 7372539 | Method for distortion correction in a microlithographic projection exposure apparatus | Andreas Kirchner, Hans-Jurgen Mann | 2008-05-13 |