Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Joerg Mallmann, Karl-Heinz Schuster, Ulrich Loering +6 more | 2019-07-09 |
| 9494483 | Measuring system for measuring an imaging quality of an EUV lens | Ralf Frese, Michael Samaniego, Markus Deguenther, Helmut Haidner, Martin Schriever | 2016-11-15 |
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Joerg Mallmann, Karl-Heinz Schuster, Ulrich Loering +6 more | 2016-09-06 |
| 8330935 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Joerg Mallmann, Karl-Heinz Schuster, Ulrich Loering +6 more | 2012-12-11 |
| 7475333 | Defining form formats with layout items that present data of business application | Wolfgang Otter, Wolfgang Weiss, Adrian Alexander, Vladislav Bezrukov, Claudia Binder +3 more | 2009-01-06 |
| 7436521 | Optical measuring apparatus and operating method for imaging error correction in an optical imaging system | Wolfgang Emer, Ulrich Wegmann, Martin Schriever | 2008-10-14 |
| 7417745 | Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry | Helmut Haidner, Wolfgang Emer, Ulrich Wegmann, Martin Schriever, Markus Goeppert | 2008-08-26 |
| 7400388 | Method for determining distortion and/or image surface | Wolfgang Emer, Uwe Schellhorn, Manfred Dahl | 2008-07-15 |
| 7234105 | Methods and systems for providing a document with interactive elements to retrieve information for processing by business applications | Vladislav Bezrukov, Thomas Goring | 2007-06-19 |