Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441970 | Measurement apparatus for measuring a wavefront aberration of an imaging optical system | Albrecht Ehrmann, Helmut Haidner | 2022-09-13 |
| 11391643 | Method and device for calibrating a diffractive measuring structure | — | 2022-07-19 |
| 10996566 | Appliance for the moiré measurement of an optical test object | — | 2021-05-04 |
| 9494483 | Measuring system for measuring an imaging quality of an EUV lens | Ralf Frese, Markus Deguenther, Helmut Haidner, Rainer Hoch, Martin Schriever | 2016-11-15 |