| 12007693 |
Laser focussing module |
Ruud Antonius Catharina Maria Beerens, Nico Johannes Antonius Hubertus Boonen, Stefan Michael Bruno Bäumer, Tolga Ergin, Andreas Hopf +7 more |
2024-06-11 |
| 9507276 |
Positioning device, control device and control method |
Anne Johannes Wilhelmus Van Lievenoogen |
2016-11-29 |
| 8634052 |
Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate table |
Suzan Leonie Auer-Jongepier, Jeroen Johannes Sophia Maria Mertens, Teunis Cornelis van den Dool, Eva Mondt, Alexander Nikolov Zdravkov +1 more |
2014-01-21 |
| 6054784 |
Positioning device having three coil systems mutually enclosing angles of 120.degree. and lithographic device comprising such a positioning device |
Erik Roelof Loopstra, Antonius T.A. Peijnenburg |
2000-04-25 |
| 5953105 |
Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device |
Gerard Van Engelen, Henricus Wilhelmus Aloysius Janssen, Adianus G. Bouwer, Cornelis D. Van Dijk, Johannes M. M. Van Kimmenade +2 more |
1999-09-14 |
| 5815246 |
Two-dimensionally balanced positioning device, and lithographic device provided with such a positioning device |
Henricus Wilhelmus Aloysius Janssen |
1998-09-29 |
| 5767948 |
Lithographic device with a three-dimensionally positionable mask holder |
Erik Loopstra, Hendricus J.M. Meijer, Jan Van Eijk |
1998-06-16 |
| 5456134 |
Magnetic transmission mechanism and applications thereof |
Adrianus G. Bouwer |
1995-10-10 |
