Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12171054 | EUV light source with a beam positioning device | Martin Lambert, Boris Regaard, Oliver Schlosser | 2024-12-17 |
| 12007693 | Laser focussing module | Ruud Antonius Catharina Maria Beerens, Nico Johannes Antonius Hubertus Boonen, Stefan Michael Bruno Bäumer, Andreas Hopf, Derk Jan Wilfred Klunder +7 more | 2024-06-11 |
| 11835699 | Focusing device and EUV radiation generating device having same | Martin Lambert | 2023-12-05 |
| 11675202 | Reflective optical element, beam guiding device and EUV-beam generating device | Martin Lambert | 2023-06-13 |
| 11304286 | Polarizer | — | 2022-04-12 |
| 10327318 | Adjusting a beam diameter and an aperture angle of a laser beam | Martin Lambert, Thomas Schwarzbaeck | 2019-06-18 |