| RE40774 |
Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device |
Gerard Van Engelen, Johannes M. M. Van Kimmenade, Jan Van Eijk |
2009-06-23 |
| 5953105 |
Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device |
Gerard Van Engelen, Frank Bernhard Sperling, Henricus Wilhelmus Aloysius Janssen, Adianus G. Bouwer, Johannes M. M. Van Kimmenade +2 more |
1999-09-14 |
| 5844666 |
Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device |
Gerard Van Engelen, Johannes M. M. Van Kimmenade, Jan Van Eijk |
1998-12-01 |
| 5150153 |
Lithographic device with a suspended object table |
Dominicus Jacobus Petrus Adrianus Franken, Fransiscus Mathijs Jacobs, Johannes M. M. Van Kimmenade, Jan Van Eljk |
1992-09-22 |
| 4818210 |
Apparatus for compressing a stack of juxtaposed foils |
Johannes Brandsma, Willem Reindert De Wild |
1989-04-04 |
| 4547631 |
Large-excursion electroacoustic transducer |
Joris A. M. Nieuwendijk, Georgius B. J. Sanders, Adrianus J. M. Kaizer |
1985-10-15 |
