Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10822701 | CVD or PVD reactor for coating large-area substrates | Walter Franken, Bernhard Zintzen | 2020-11-03 |
| 7922474 | Imprint lithography | Yvonne Wendela Kruijt-Stegeman, Aleksey Yurievich Kolesnychenko, Helmar Van Santen | 2011-04-12 |
| 7105955 | Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method | Johannes Petrus Martinus Bernardus Vermeulen, Erik Roelof Loopstra | 2006-09-12 |
| 6926588 | Band coil | Johannes Petrus Martinus Bernardus Vermeulen, Fransiscus Marinus Andrea Maria Van Gaal, Petrus Carolus Maria Frissen | 2005-08-09 |
| 6337484 | Positioning device and lithographic projection apparatus comprising such a device | Erik Roelof Loopstra, Adrianus G. Bouwer, Harmen Klaas Van Der Schoot | 2002-01-08 |
| 5953105 | Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device | Gerard Van Engelen, Frank Bernhard Sperling, Adianus G. Bouwer, Cornelis D. Van Dijk, Johannes M. M. Van Kimmenade +2 more | 1999-09-14 |
| 5815246 | Two-dimensionally balanced positioning device, and lithographic device provided with such a positioning device | Frank Bernhard Sperling | 1998-09-29 |
| 5204712 | Support device with a tiltable object table, and optical lithographic device provided with such a support device | Adrianus G. Bouwer, Marcel C. M. Baggen, Petrus Rutgerus Bartray, Jan Van Eijk | 1993-04-20 |