Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10822701 | CVD or PVD reactor for coating large-area substrates | Bernhard Zintzen, Henricus Wilhelmus Aloysius Janssen | 2020-11-03 |
| 9847241 | Transport module for a semiconductor fabrication device or coupling device | Martin Freundt | 2017-12-19 |
| 9045818 | Shadow mask held magnetically on a substrate support | Markus Gersdorff, Arno Offermanns | 2015-06-02 |
| 8308867 | Device for the temperature control of the surface temperatures of substrates in a CVD reactor | Johannes Käppeler | 2012-11-13 |
| 7056388 | Reaction chamber with at least one HF feedthrough | Gerd Strauch, Johannes Käppeler, Holger Jurgensen | 2006-06-06 |
| 4253963 | Asymmetrical ultrafiltration membrane on the basis of cellulose triacetate | Dieter Nussbaumer, Horst Perl, Ludwig Weickhardt | 1981-03-03 |