| 10919045 |
Method and device for fragmenting and/or weakening pourable material by means of high-voltage discharges |
Alexander Weh, Jean-Pierre Aeby |
2021-02-16 |
| 10730054 |
Method and device for fragmenting and/or weakening pourable material by means of high-voltage discharges |
Reinhard Müller-Siebert |
2020-08-04 |
| 9447500 |
CVD reactor having a substrate holder resting on a gas cushion comprising a plurality of zones |
Francisco Ruda Y Witt |
2016-09-20 |
| 8986453 |
Device for coating substrates disposed on a susceptor |
Adam Boyd, Victor Saywell, Jan Mulder, Olivier Feron |
2015-03-24 |
| 8439023 |
Ignition coil, in particular for an internal combustion engine of a motor vehicle |
Konstantin Lindenthal, Holger Raaf, Thomas Breckle |
2013-05-14 |
| 8308867 |
Device for the temperature control of the surface temperatures of substrates in a CVD reactor |
Walter Franken |
2012-11-13 |
| 8157915 |
CVD reactor having a process-chamber ceiling which can be lowered |
Martin Dauelsberg, Bernd Schulte |
2012-04-17 |
| 8152924 |
CVD reactor comprising a gas inlet member |
Martin Dauelsberg, Conor Nicholas Martin |
2012-04-10 |
| 8062426 |
CVD reactor with RF-heated process chamber |
Frank Wischmeyer |
2011-11-22 |
| 7332038 |
Device for depositing in particular crystalline layers on one or more, in particular likewise crystalline substrates |
Holger Jurgensen, Gerhard Karl Strauch |
2008-02-19 |
| 7201942 |
Coating method |
Holger Jurgensen, Gerd Strauch, Dietmar Schmitz |
2007-04-10 |
| 7147718 |
Device and method for the deposition of, in particular, crystalline layers on, in particular, crystalline substrates |
Holger Jurgensen, Gerhard Karl Strauch |
2006-12-12 |
| 7067012 |
CVD coating device |
Holger Jurgensen, Gerhard Karl Strauch |
2006-06-27 |
| 7056388 |
Reaction chamber with at least one HF feedthrough |
Walter Franken, Gerd Strauch, Holger Jurgensen |
2006-06-06 |
| 6905548 |
Device for the deposition of crystalline layers on crystalline substrates |
Holger Jurgensen, Gerhard Karl Strauch |
2005-06-14 |
| 6811614 |
CVD reactor with substrate holder which is rotatably driven and mounted by a gas stream |
Frank Wischmeyer, Rune Berge |
2004-11-02 |
| 6309465 |
CVD reactor |
Holger Jurgensen, Marc Deschler, Gerd Strauch, Markus Schumacher |
2001-10-30 |
