Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062426 | CVD reactor with RF-heated process chamber | Johannes Käppeler | 2011-11-22 |
| 7048802 | CVD reactor with graphite-foam insulated, tubular susceptor | Johannes Kaeppeler, Rune Berge | 2006-05-23 |
| 6811614 | CVD reactor with substrate holder which is rotatably driven and mounted by a gas stream | Johannes Käppeler, Rune Berge | 2004-11-02 |