Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10385530 | Method for compaction detection and control when compacting a soil with a deep vibrator | Peter B. Nagy, Dietmar Adam, Christoph Adam, Maximilian Schmitter, Fritz Kopf +1 more | 2019-08-20 |
| 9018105 | CVD method and CVD reactor | — | 2015-04-28 |
| 8846501 | Method for equipping an epitaxy reactor | — | 2014-09-30 |
| 8349081 | Gas distributor with pre-chambers arranged in planes | Markus Reinhold, Peter Baumann | 2013-01-08 |
| 8298337 | Gas inlet element for a CVD reactor | Markus Reinhold, Peter Baumann | 2012-10-30 |
| 7709398 | Process and apparatus for depositing semiconductor layers using two process gases, one of which is preconditioned | Johannes Kaeppeler, Markus Reinhold, Bernd Schulte | 2010-05-04 |
| 7625448 | Inlet system for an MOCVD reactor | Martin Dauelsberg, Martin Conor, Johannes Kaeppeler | 2009-12-01 |
| 7524532 | Process for depositing thin layers on a substrate in a process chamber of adjustable height | Holger Jurgensen | 2009-04-28 |
| 7332038 | Device for depositing in particular crystalline layers on one or more, in particular likewise crystalline substrates | Holger Jurgensen, Johannes Käppeler | 2008-02-19 |
| 7282096 | Arrangement comprising a support body and a substrate holder which is driven in rotation and gas-supported thereon | — | 2007-10-16 |
| 7147718 | Device and method for the deposition of, in particular, crystalline layers on, in particular, crystalline substrates | Holger Jurgensen, Johannes Käppeler | 2006-12-12 |
| 7128785 | Method for depositing especially crystalline layers from the gas phase onto especially crystalline substrates | Johannes Kaeppeler, Michael Heuken, Rainer Beccard | 2006-10-31 |
| 7067012 | CVD coating device | Holger Jurgensen, Johannes Käppeler | 2006-06-27 |
| 6972050 | Method for depositing in particular crystalline layers, and device for carrying out the method | Michael D. Bremser, Martin Dauelsberg | 2005-12-06 |
| 6962624 | Method and device for depositing in particular organic layers using organic vapor phase deposition | Holger Jurgensen, Markus Schwambera | 2005-11-08 |
| 6905548 | Device for the deposition of crystalline layers on crystalline substrates | Holger Jurgensen, Johannes Käppeler | 2005-06-14 |
| 6798060 | Power device and direct aluminum bonded substrate thereof | — | 2004-09-28 |
| 6670216 | Method for manufacturing a power semiconductor device and direct bonded substrate thereof | — | 2003-12-30 |