Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8906456 | Apparatus and method for high-throughput chemical vapor deposition | Piotr Strzyzewski, Marcus Schumacher, Johannes Lindner, Antonio Mesquida Küsters | 2014-12-09 |
| 8349081 | Gas distributor with pre-chambers arranged in planes | Markus Reinhold, Gerhard Karl Strauch | 2013-01-08 |
| 8298337 | Gas inlet element for a CVD reactor | Markus Reinhold, Gerhard Karl Strauch | 2012-10-30 |
| 8114480 | Method for self-limiting deposition of one or more monolayers | Johannes Lindner | 2012-02-14 |
| 7732308 | Process for depositing layers containing silicon and germanium | Marcus Schumacher, Johannes Lindner, Timothy McEntee | 2010-06-08 |
| 7410670 | Process and apparatus for depositing single-component or multi-component layers and layer sequences using discontinuous injection of liquid and dissolved starting substances via a multi-channel injection unit | Marcus Schumacher, Johannes Lindner, Marc Deschler | 2008-08-12 |
| 5911335 | Liner choker | — | 1999-06-15 |