Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7732308 | Process for depositing layers containing silicon and germanium | Marcus Schumacher, Peter Baumann, Johannes Lindner | 2010-06-08 |
| 4756810 | Deposition and planarizing methods and apparatus | Lawrence T. Lamont, Jr., Roderick C. Mosely | 1988-07-12 |