MS

Marcus Schumacher

AI Aixtron: 4 patents #9 of 62Top 15%
📍 Kerpen, DE: #22 of 128 inventorsTop 20%
Overall (All Time): #1,223,376 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
8906456 Apparatus and method for high-throughput chemical vapor deposition Piotr Strzyzewski, Peter Baumann, Johannes Lindner, Antonio Mesquida Küsters 2014-12-09
7732308 Process for depositing layers containing silicon and germanium Peter Baumann, Johannes Lindner, Timothy McEntee 2010-06-08
7410670 Process and apparatus for depositing single-component or multi-component layers and layer sequences using discontinuous injection of liquid and dissolved starting substances via a multi-channel injection unit Peter Baumann, Johannes Lindner, Marc Deschler 2008-08-12
6849241 Device and method for depositing one or more layers on a substrate Martin Dauelsberg, Holger Juergensen, Gerd Strauch, Piotr Strzyzewski 2005-02-01