Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7473316 | Method of growing nitrogenous semiconductor crystal materials | Bernd Schottker, Michael Heuken, Holger Jurgensen, Bernd Wachtendorf | 2009-01-06 |
| 7294207 | Gas-admission element for CVD processes, and device | Johannes Kaeppeler, Martin Dauelsberg | 2007-11-13 |
| 7201942 | Coating method | Holger Jurgensen, Johannes Käppeler, Dietmar Schmitz | 2007-04-10 |
| 7056388 | Reaction chamber with at least one HF feedthrough | Walter Franken, Johannes Käppeler, Holger Jurgensen | 2006-06-06 |
| 6849241 | Device and method for depositing one or more layers on a substrate | Martin Dauelsberg, Marcus Schumacher, Holger Juergensen, Piotr Strzyzewski | 2005-02-01 |
| 6786973 | Method for depositing in particular crystalline layers, gas-admission element and device for carrying out the method | Markus Reinhold | 2004-09-07 |
| 6309465 | CVD reactor | Holger Jurgensen, Marc Deschler, Markus Schumacher, Johannes Käppeler | 2001-10-30 |