Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5281320 | Wafer coating system | Frederick T. Turner, Martin A. Hutchinson, R. Howard Shaw | 1994-01-25 |
| 5114556 | Deposition apparatus and method for enhancing step coverage and planarization on semiconductor wafers | — | 1992-05-19 |
| 5024747 | Wafer coating system | Frederick T. Turner, Martin A. Hutchinson, R. Howard Shaw | 1991-06-18 |
| 4909314 | Apparatus for thermal treatment of a wafer in an evacuated environment | — | 1990-03-20 |
| 4756810 | Deposition and planarizing methods and apparatus | Roderick C. Mosely, Timothy McEntee | 1988-07-12 |
| 4756815 | Wafer coating system | Frederick T. Turner, Martin A. Hutchinson, R. Howard Shaw | 1988-07-12 |
| 4743570 | Method of thermal treatment of a wafer in an evacuated environment | — | 1988-05-10 |
| 4717461 | System and method for processing workpieces | Thomas L. Strahl, Carl T. Peterson, Hobart A. Brown, Lonnie W. McCormick, Roderick C. Mosely | 1988-01-05 |
| 4680061 | Method of thermal treatment of a wafer in an evacuated environment | — | 1987-07-14 |
| 4673480 | Magnetically enhanced sputter source | — | 1987-06-16 |
| 4457825 | Sputter target for use in a sputter coating source | — | 1984-07-03 |
| 4414086 | Magnetic targets for use in sputter coating apparatus | — | 1983-11-08 |