| 7001491 |
Vacuum-processing chamber-shield and multi-chamber pumping method |
Michael J. Lombardi, Glyn Reynolds, Robert F. Foster, Robert Rowan |
2006-02-21 |
| 5605866 |
Clamp with wafer release for semiconductor wafer processing equipment |
Adolphus E. McClanahan, Kenneth E. Anderson, Phillip B. Nicholson, Martin A. Hutchinson |
1997-02-25 |
| 5513594 |
Clamp with wafer release for semiconductor wafer processing equipment |
Adolphus E. McClanahan, Kenneth E. Anderson, Phillip B. Nicholson, Martin A. Hutchinson |
1996-05-07 |
| 5281320 |
Wafer coating system |
Martin A. Hutchinson, R. Howard Shaw, Lawrence T. Lamont, Jr. |
1994-01-25 |
| 5024747 |
Wafer coating system |
Martin A. Hutchinson, R. Howard Shaw, Lawrence T. Lamont, Jr. |
1991-06-18 |
| 4917556 |
Modular wafer transport and processing system |
Lawrence R. Stark |
1990-04-17 |
| 4756815 |
Wafer coating system |
Martin A. Hutchinson, R. Howard Shaw, Lawrence T. Lamont, Jr. |
1988-07-12 |
| 4436602 |
Blocking shield and method for contouring the thickness of sputter coated layers |
David J. Harra, Martin A. Hutchinson |
1984-03-13 |
| 4416759 |
Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers |
David J. Harra, Martin A. Hutchinson |
1983-11-22 |
| 4416760 |
Apparatus for asymmetrically contouring the thickness of sputter coated layers |
— |
1983-11-22 |
| 4392938 |
Radio frequency etch table with biased extension member |
David J. Harra |
1983-07-12 |
| 4313815 |
Sputter-coating system, and vaccuum valve, transport, and sputter source array arrangements therefor |
Walter E. Graves, Donald R. Boys |
1982-02-02 |