| 10264993 |
Sample scanning and analysis system and methods for using the same |
Erin Looney |
2019-04-23 |
| 8647272 |
Non-invasive scanning apparatuses |
Peter F. Mastin, Mark N. Iverson, Rick Eugene Sanner, Martin A. Hutchinson |
2014-02-11 |
| 8647273 |
Non-invasive weight and performance management |
Jacquelyn Fuzell, Timothy D. Casey |
2014-02-11 |
| 8382668 |
Non-invasive determination of characteristics of a sample |
Aiguo Xu |
2013-02-26 |
| 8259299 |
Gas scanning and analysis |
Rick Eugene Sanner, Mark N. Iverson |
2012-09-04 |
| 5985115 |
Internally cooled target assembly for magnetron sputtering |
Larry D. Hartsough, Ronald R. Cochran, Mingwei Jiang |
1999-11-16 |
| 5417833 |
Sputtering apparatus having a rotating magnet array and fixed electromagnets |
Larry D. Hartsough |
1995-05-23 |
| 5314597 |
Sputtering apparatus with a magnet array having a geometry for a specified target erosion profile |
— |
1994-05-24 |
| 4714536 |
Planar magnetron sputtering device with combined circumferential and radial movement of magnetic fields |
Kenneth F. Freeman, Charles B. Garrett, Lawrence Chung-Lai Lei |
1987-12-22 |
| 4512391 |
Apparatus for thermal treatment of semiconductor wafers by gas conduction incorporating peripheral gas inlet |
— |
1985-04-23 |
| 4436602 |
Blocking shield and method for contouring the thickness of sputter coated layers |
Frederick T. Turner, Martin A. Hutchinson |
1984-03-13 |
| 4416759 |
Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers |
Frederick T. Turner, Martin A. Hutchinson |
1983-11-22 |
| 4392932 |
Method for obtaining uniform etch by modulating bias on extension member around radio frequency etch table |
— |
1983-07-12 |
| 4392938 |
Radio frequency etch table with biased extension member |
Frederick T. Turner |
1983-07-12 |
| 4303251 |
Flange sealing joint with removable metal gasket |
William C. Nystrom |
1981-12-01 |