RR

Robert Rowan

TL Tokyo Electron Limited: 4 patents #1,723 of 5,567Top 35%
Overall (All Time): #1,257,473 of 4,157,543Top 35%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7001491 Vacuum-processing chamber-shield and multi-chamber pumping method Michael J. Lombardi, Glyn Reynolds, Robert F. Foster, Frederick T. Turner 2006-02-21
6395095 Process apparatus and method for improved plasma processing of a substrate William Jones, Edward L. Sill, Thomas J. Licata 2002-05-28
6368987 Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions Stanislaw Kopacz, Douglas A. Webb, Gerrit J. Leusink, Rene E. LeBlanc, Michael S. Ameen +2 more 2002-04-09
6161500 Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions Stanislaw Kopacz, Douglas A. Webb, Gerrit J. Leusink, Rene E. LeBlanc, Michael S. Ameen +2 more 2000-12-19