Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5096364 | Wafer arm handler mechanism | Mark G. Messer | 1992-03-17 |
| 4917556 | Modular wafer transport and processing system | Frederick T. Turner | 1990-04-17 |
| 4670126 | Sputter module for modular wafer processing system | Mark G. Messer | 1987-06-02 |