Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5096364 | Wafer arm handler mechanism | Lawrence R. Stark | 1992-03-17 |
| 4670126 | Sputter module for modular wafer processing system | Lawrence R. Stark | 1987-06-02 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5096364 | Wafer arm handler mechanism | Lawrence R. Stark | 1992-03-17 |
| 4670126 | Sputter module for modular wafer processing system | Lawrence R. Stark | 1987-06-02 |