Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359319 | Arrangement for measuring the surface temperature of a susceptor in a CVD reactor | Peter Sebald LAUFFER | 2025-07-15 |
| 12110591 | Susceptor arrangement of a CVD reactor | Marcel KOLLBERG, Hendrik Rauf | 2024-10-08 |
| 12098462 | Method for producing a component part of a CVD reactor | Marcel KOLLBERG | 2024-09-24 |
| 11959190 | Device for connecting a susceptor to a drive shaft | Torsten Werner Bastke, Mike Pfisterer | 2024-04-16 |
| 11702740 | Closure element for closing a loading opening of an inner housing of a CVD reactor | Marcel KOLLBERG, Mike Pfisterer | 2023-07-18 |
| 11441223 | Susceptor for a CVD reactor | Oliver Schön, Marcus Schaffrath | 2022-09-13 |
| 11286566 | Apparatus for deposition of a III-V semiconductor layer | Markus Deufel, Marcel KOLLBERG | 2022-03-29 |
| 10883171 | CVD reactor and method for cleaning a CVD reactor | Marcel KOLLBERG, Wilhelm Josef Thomas KRÜCKEN, Markus Deufel, Mike Pfisterer | 2021-01-05 |
| 9447500 | CVD reactor having a substrate holder resting on a gas cushion comprising a plurality of zones | Johannes Käppeler | 2016-09-20 |