Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11286566 | Apparatus for deposition of a III-V semiconductor layer | Francisco Ruda Y Witt, Marcel KOLLBERG | 2022-03-29 |
| 10883171 | CVD reactor and method for cleaning a CVD reactor | Marcel KOLLBERG, Wilhelm Josef Thomas KRÜCKEN, Francisco Ruda Y Witt, Mike Pfisterer | 2021-01-05 |
| 10329668 | Device and method for exhaust gas treatment on CVD reactor | Patrick Franken | 2019-06-25 |