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Marcel C. M. Baggen

AB Asm Lithography B.V.: 1 patents #15 of 53Top 30%
U.S. Philips: 1 patents #4,133 of 8,851Top 50%
Overall (All Time): #3,822,275 of 4,157,543Top 95%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
5204712 Support device with a tiltable object table, and optical lithographic device provided with such a support device Adrianus G. Bouwer, Henricus Wilhelmus Aloysius Janssen, Petrus Rutgerus Bartray, Jan Van Eijk 1993-04-20