| 11121115 |
Y-theta table for semiconductor equipment |
Ronald Maarten Schneider, Jasper Anne Frido Marikus Simons, Timotheus Hubertus Christiaan Groothuijsen |
2021-09-14 |
| 10095123 |
Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program |
Marinus Maria Johannes Van De Wal, Wilhelmus Henricus Theodorus Maria Aangenent, Jeroen Johannes Theodorus Hendrikus De Best |
2018-10-09 |
| 10061213 |
Sensor, object positioning system, lithographic apparatus and device manufacturing method |
Johannes Antonius Gerardus Akkermans, Ruud Antonius Catharina Maria Beerens, Sander Christiaan Broers, Jeroen Johannes Theodorus Hendrikus De Best, Adrianus Marinus Wouter Heeren +6 more |
2018-08-28 |
| 9897926 |
Stage positioning system and lithographic apparatus |
Wilhelmus Henricus Theodorus Maria Aangenent, Lucas Koorneef, Theo Anjes Maria Ruijl, Stanley Constant Johannes Martinus Van Den Berg, Stan Henricus Van Der Meulen +2 more |
2018-02-20 |
| 9329501 |
Lithographic apparatus, method of deforming a substrate table and device manufacturing method |
Yang-Shan Huang, Hans Butler, Sven Antoin Johan Hol, Engelbertus Antonius Fransiscus Van Der Pasch, Bastiaan Lambertus Wilhelmus Marinus Van De Ven +3 more |
2016-05-03 |
| 9268211 |
Lithographic apparatus, and patterning device for use in a lithographic process |
Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen |
2016-02-23 |
| 9192271 |
Suction unit and autonomous vacuum cleaner |
Jeroen Dekkers, Theo Anjes Maria Ruijl, Silvester Matheus Reijnders, Hubert Gerard Jean Joseph Amaury Vroomen, Thomas Petrus Hendricus Warmerdam +1 more |
2015-11-24 |
| 9110387 |
Lithographic apparatus comprising a substrate table and a surface substrate actuator |
Hans Butler, Sven Antoin Johan Hol, Johannes Petrus Martinus Bernardus Vermeulen, Yang-Shan Huang |
2015-08-18 |
| 9019470 |
Lithographic apparatus, and patterning device for use in a lithographic process |
Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen |
2015-04-28 |
| 8982359 |
System for detecting motion, lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen |
2015-03-17 |
| 8896811 |
Positioning system and a method for positioning a substage with respect to a frame |
Sven Antoin Johan Hol, Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen, Geert-Jan Petrus Naaijkens, Marijn Kessels +1 more |
2014-11-25 |
| 8687171 |
Electromagnetic actuator, stage apparatus and lithographic apparatus |
Sven Antoin Johan Hol, Johannes Petrus Martinus Bernardus Vermeulen, Gerard Johannes Pieter Nijsse, Simon Bernardus Cornelis Maria Martens, Yang-Shan Huang +4 more |
2014-04-01 |
| 8482719 |
Positioning system, lithographic apparatus and method |
Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen |
2013-07-09 |
| 8441616 |
Lithographic apparatus and device manufacturing method |
— |
2013-05-14 |
| 8368868 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless |
Johannes Petrus Martinus Bernardus Vermeulen, Marcel Koenraad Marie Baggen, Hans Butler, Henrikus Herman Marie Cox, Andre Bernardus Jeunink +7 more |
2013-02-05 |
| 8059261 |
Masking device, lithographic apparatus, and device manufacturing method |
Antoine Hendrik Verweij, Jacobus Frederik Molenaar, Gerbrand Petrus Johannes Van Den Hoven, Michael Johannes Vervoordeldonk, Michel Gerardus Pardoel +1 more |
2011-11-15 |
| 7948122 |
Displacement device |
Johan Cornelis Compter, Petrus Carolus Maria Frissen |
2011-05-24 |
| 7902494 |
System for detecting motion of a body |
Ronatus Gerardus Klaver, Theo Anjes Maria Ruijl, Michael Josepha Mathijs Renkens |
2011-03-08 |
| 7612867 |
Lithographic apparatus |
Gerard Van Schothorst, Fransiscus Hendrikus Van Deuren, Erik Roelof Loopstra, Robert-Han Munnig Schmidt, Felix Godfried Peter Peeters |
2009-11-03 |
| RE40774 |
Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device |
Gerard Van Engelen, Cornelis D. Van Dijk, Johannes M. M. Van Kimmenade |
2009-06-23 |
| 7423730 |
Lithographic apparatus |
Gerard Van Schothorst, Fransiscus Hendrikus Van Deuren, Erik Roelof Loopstra, Robert-Han Munnig Schmidt, Felix Godfried Peter Peeters |
2008-09-09 |
| 7375479 |
Apparatus for processing an object with high position accurancy |
Arjan Franklin Bakker, Dennis Erwin Bos, Johan Cornelis Compter, Angelo Cesar Peter De Klerk, Franciscus Martinus Roes +2 more |
2008-05-20 |
| 7248339 |
Lithographic apparatus and device manufacturing method |
Gerard Van Schothorst, Erik Roelof Loopstra, Robert-Han Munnig Schmidt, Felix Godfried Peter Peeters |
2007-07-24 |
| 6943464 |
Lithographic apparatus and motor for use in the apparatus |
Sven Antoin Johan Hol, Angelo Cesar Peter De Klerk, Harmen Klaas Van Der Schoot |
2005-09-13 |
| 6717296 |
Lithographic apparatus and motor for use in the apparatus |
Sven Antoin Johan Hol, Angelo Oscar Peter De Klerk, Harmen Klaas Van Der Schoot |
2004-04-06 |
