Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866529 | Lithographic apparatus and device manufacturing method | Hans Butler, Maurice Willem Jozef Etiënne Wijckmans | 2020-12-15 |
| 10345723 | Substrate handling system and lithographic apparatus | Joeri Lof | 2019-07-09 |
| 9097990 | Lithographic apparatus and stage system | Jan-Gerard Cornelis Van Der Toorn, Marcel Koenraad Marie Baggen, Stefan Geerte Kruijswijk, Jeroen Pieter Starreveld, Mark Constant Johannes Baggen | 2015-08-04 |
| 8915340 | Actuator arrangement for active vibration isolation comprising an inertial reference mass | Theo Anges Maria Ruijl, Robertus Mathijs Gerardus Rijs, Johannes Müller | 2014-12-23 |
| 8885147 | Lithographic apparatus and device manufacturing method | Ronald Casper Kunst, Youssef Karel Maria De Vos, Johannes Hubertus Antonius Van De Rijdt, Robertus Jacobus Theodorus Van Kempen | 2014-11-11 |
| 8279401 | Position control system, a lithographic apparatus and a method for controlling a position of a movable object | Mark Constant Johannes Baggen | 2012-10-02 |
| 8091694 | Actuator arrangement for active vibration isolation comprising an inertial reference mass | Theo Anjes Maria Ruijl, Robertus Mathijs Gerardus Rijs, Johannes Müller | 2012-01-10 |
| 8059261 | Masking device, lithographic apparatus, and device manufacturing method | Antoine Hendrik Verweij, Jacobus Frederik Molenaar, Gerbrand Petrus Johannes Van Den Hoven, Michel Gerardus Pardoel, Gerardus Johannes Verdoes +1 more | 2011-11-15 |
| 7571793 | Actuator arrangement for active vibration isolation using a payload as an inertial reference mass | Thomas Petrus Hendricus Warmerdam | 2009-08-11 |
| 5532565 | Controller | — | 1996-07-02 |