| 11269262 |
Frame assembly, lithographic apparatus and device manufacturing method |
Hans Butler, Joep Sander De Beer, Cornelius Adrianus Lambertus De Hoon, Jeroen Pieter Starreveld, Martinus Van Duijnhoven |
2022-03-08 |
| 11169450 |
Pneumatic support device and lithographic apparatus with pneumatic support device |
Hans Butler, Joep Sander De Beer, Cornelius Adrianus Lambertus De Hoon, Jeroen Pieter Starreveld, Martinus Van Duijnhoven |
2021-11-09 |
| 11029612 |
Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness |
Maarten Hartger Kimman, Hans Butler, Olof Martinus Josephus Fischer, Christiaan Alexander Hoogendam, Theodorus Mattheus Joannus Maria Huizinga +2 more |
2021-06-08 |
| 10962890 |
Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method |
Wilhelmus Franciscus Johannes Simons, Dave Braaksma, Hans Butler, Hendrikus Herman Marie Cox, René Wilhelmus Antonius Hubertus LEENAARS +2 more |
2021-03-30 |
| 10955761 |
Lithographic apparatus, lithographic projection apparatus and device manufacturing method |
Hans Butler |
2021-03-23 |
| 10866529 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Michael Johannes Vervoordeldonk |
2020-12-15 |
| 10838312 |
Lithographic apparatus, lithographic projection apparatus and device manufacturing method |
Jeroen Pieter Starreveld |
2020-11-17 |
| 10816910 |
Vibration isolator, lithographic apparatus and device manufacturing method |
Hans Butler, Cornelius Adrianus Lambertus De Hoon, Fransiscus Mathijs Jacobs, Pavel Kagan, Jeroen Pieter Starreveld |
2020-10-27 |
| 10578983 |
Lithographic apparatus having an active base frame support |
Hans Butler, Björn Hubertus Maria Bukkems, Cornelius Adrianus Lambertus De Hoon |
2020-03-03 |
| 10503086 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Cornelius Adrianus Lambertus De Hoon, Fransiscus Mathijs Jacobs, Pavel Kagan, Jeroen Pieter Starreveld |
2019-12-10 |
| 10209634 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Engelbertus Antonius Fransiscus Van Der Pasch, Christiaan Alexander Hoogendam, Bernardus Antonius Johannes Luttikhuis |
2019-02-19 |
| 9500953 |
Radiation source |
Jan Frederik Hoogkamp, Bastiaan Stephanus Hendricus Jansen |
2016-11-22 |
| 9164401 |
Projection system and lithographic apparatus |
Erik Roelof Loopstra, Wilhelmus Petrus De Boeij, Hans Butler, Robertus Johannes Marinus De Jongh, Jan Bernard Plechelmus Van Schoot +2 more |
2015-10-20 |
| 9122173 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens +4 more |
2015-09-01 |
| 8913228 |
Lithographic apparatus and device manufacturing method |
Martinus Agnes Willem Cuijpers, Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Joost Jeroen Ottens, Theodorus Petrus Maria Cadee +7 more |
2014-12-16 |
| 8908144 |
Lithographic apparatus and device manufacturing method |
Rogier Herman Mathijs Groeneveld, Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken, Bastiaan Stephanus Hendricus Jansen, Robertus Johannes Marinus De Jongh +1 more |
2014-12-09 |
| 8300208 |
Lithographic apparatus and a method to compensate for the effect of disturbances on the projection system of a lithographic apparatus |
Erik Roelof Loopstra, Robertus Leonardus Tousain, Adrianus Hendrik Koevoets |
2012-10-30 |
| 8289498 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Petrus Rutgerus Bartray, Leon Martin Levasier, Bernardus Antonius Johannes Luttikhuis, Josephus Jacobus Smits +7 more |
2012-10-16 |
| 8144310 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens +4 more |
2012-03-27 |