| 12147162 |
Imprint lithography |
Catharinus De Schiffart, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars, Sander Frederik Wuister +5 more |
2024-11-19 |
| 11635696 |
Imprint lithography |
Catharinus De Schiffart, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars, Sander Frederik Wuister +5 more |
2023-04-25 |
| 10908510 |
Imprint lithography |
Catharinus De Schiffart, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars, Sander Frederik Wuister +5 more |
2021-02-02 |
| 10890851 |
Imprint lithography |
Catharinus De Schiffart, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars, Sander Frederik Wuister +5 more |
2021-01-12 |
| 10712678 |
Imprint lithography apparatus and method |
Yvonne Wendela Kruijt-Stegeman, Andre Bernardus Jeunink, Arie Jeffrey Den Boef, Vadim Yevgenyevich Banine, Gerard Van Schothorst +5 more |
2020-07-14 |
| 10580545 |
Beam delivery apparatus and method |
Vadim Yevgenyevich Banine, Petrus Rutgerus Bartraij, Ramon Pascal Van Gorkom, Lucas J. P. Ament, Pieter Willem Herman De Jager +11 more |
2020-03-03 |
| 10216101 |
Reflector |
Han-Kwang Nienhuys, Sjoerd Nicolaas Lambertus Donders, Gosse Charles De Vries, Erik Roelof Loopstra |
2019-02-26 |
| 10168621 |
Radiation beam apparatus |
Jeroen Dekkers, Han-Kwang Nienhuys |
2019-01-01 |
| 9952513 |
Undulator |
Andrey Nikipelov, Johannes Antonius Gerardus Akkermans, Leonardus Adrianus Gerardus Grimminck, Erik Roelof Loopstra, Adrian Toma +1 more |
2018-04-24 |
| 9864279 |
Imprint lithography |
Catharinus De Schiffart, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars, Sander Frederik Wuister +5 more |
2018-01-09 |
| 9606458 |
Method for calibration of an encoder scale and a lithographic apparatus |
Jeroen Dekkers, Andre Bernardus Jeunink, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Carolus Johannes Catharina Schoormans +1 more |
2017-03-28 |
| 9310700 |
Lithography method and apparatus |
Adrianus Hendrik Koevoets, Sander Frederik Wuister |
2016-04-12 |
| 9304401 |
Measurement of the position of a radiation beam spot in lithography |
Felix Godfried Peter Peeters, Jozef Petrus Henricus Benschop, Gregor Edward Van Baars, Jeroen Dekkers |
2016-04-05 |
| 9122173 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Marc Wilhelmus Maria Van Der Wijst +4 more |
2015-09-01 |
| 8144310 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Marc Wilhelmus Maria Van Der Wijst +4 more |
2012-03-27 |
| 7554105 |
Lithographic apparatus and device manufacturing method |
Dominicus Jacobus Petrus Adrianus Franken, Erik Roelof Loopstra, Pertrus Bartray, Marc Wilhelmus Maria Van Der Wijst, Gerard Van Schothorst +1 more |
2009-06-30 |
| 7426015 |
Device manufacturing method and lithographic apparatus |
Hendricus Johannes Maria Meijer |
2008-09-16 |
| 7119886 |
Lithographic apparatus, device manufacturing method, and angular encoder |
Martinus Hendrikus Antonius Leenders, Hendricus Johannes Maria Meijer, Engelbertus Antonius Fransiscus Van Der Pasch, Theo Anjes Maria Ruijl |
2006-10-10 |
| 7102729 |
Lithographic apparatus, measurement system, and device manufacturing method |
Alexander Matthijs Struycken, Ruben Jan Kok, Martinus Cornells Maria Verhagen |
2006-09-05 |