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Optical device and associated system |
Sumant Sukdew Ramanujan Oemrawsingh, Arno Jan Bleeker, Engelbertus Antonius Fransiscus Van Der Pasch, Bert Pieter Van Drieënhuizen |
2020-07-14 |
| 10222702 |
Radiation source |
Arno Jan Bleeker, Ramon Mark Hofstra, Erik Petrus Buurman, Johannes Hubertus Josephina Moors, Harm-Jan Voorma +3 more |
2019-03-05 |
| 9983482 |
Radiation collector, radiation source and lithographic apparatus |
Erik Roelof Loopstra, Olav Waldemar Vladimir Frijns, Stig Bieling, Antonius Theodorus Wilhelmus Kempen, Ivo Vanderhallen +6 more |
2018-05-29 |
| 9986628 |
Method and apparatus for generating radiation |
Erik Roelof Loopstra, Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Andrey Nikipelov, Edgar Alberto Osorio Oliveros +2 more |
2018-05-29 |
| 9335641 |
Optical element mount for lithographic apparatus |
Henricus Gerardus Tegenbosch, Jacob Kleijn, Ruud Antonius Catharina Maria Beerens, Ivo Vanderhallen |
2016-05-10 |
| 8598550 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun +4 more |
2013-12-03 |
| 8134136 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun +4 more |
2012-03-13 |
| 7897941 |
Lithographic apparatus, device manufacturing method, and use of a radiation collector |
Johannes Christiaan Leonardus Franken, Leon Joseph Maria Van Den Schoor |
2011-03-01 |
| 7767989 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Harm-Jan Voorma, Lambertus Adrianus Van Den Wildenberg +4 more |
2010-08-03 |
| 7602472 |
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device |
Edwin Johan Buis, Erik Theodorus Maria Bijlaart, Christiaan Alexander Hoogendam, Arnoud Cornelis Wassink, Paul Peter Anna Antonius Brom |
2009-10-13 |
| 7501642 |
Radiation source |
Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Johannes Christiaan Leonardus Franken, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev |
2009-03-10 |
| 7462841 |
Lithographic apparatus, device manufacturing method, and use of a radiation collector |
Johannes Christiaan Leonardus Franken, Leon Joseph Maria Van Den Schoor |
2008-12-09 |
| 7372058 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Lambertus Adrianus Wildenberg, Vladimir Mihailovitch Krivtsun, Johannes Bernardus Ridder, Vladimir Vitalevitch Ivanov +1 more |
2008-05-13 |
| 7102729 |
Lithographic apparatus, measurement system, and device manufacturing method |
Michael Jozef Mathijs Renkens, Ruben Jan Kok, Martinus Cornells Maria Verhagen |
2006-09-05 |