Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339588 | High force low voltage piezoelectric micromirror actuator | Luc Haspeslagh, Nitesh Pandey, Ties Wouter VAN DER WOORD, Halil Gökay YEGEN, Guilherme Brondani Torri +3 more | 2025-06-24 |
| 9986628 | Method and apparatus for generating radiation | Erik Roelof Loopstra, Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Andrey Nikipelov, Alexander Matthijs Struycken +2 more | 2018-05-29 |
| 9599912 | Lithographic apparatus | — | 2017-03-21 |
| 9329503 | Multilayer mirror | Vadim Iourievich Timoshkov, Jan Bernard Plechelmus Van Schoot, Antonius Theodorus Wilhelmus Kempen, Andrei Mikhailovich Yakunin | 2016-05-03 |