| 11421729 |
Elastic guiding device, positioning device, blade and lithographic apparatus |
Erwin Andreas Bernardus Mulder, Krijn Frederik Bustraan, Antonius Franciscus Johannes De Groot, Rinze Koolstra |
2022-08-23 |
| 10990015 |
Debris mitigation system, radiation source and lithographic apparatus |
Michel Riepen, Ronald Johannes Hultermans |
2021-04-27 |
| 8018664 |
Housing structure |
Stefan Xalter, Peter Deufel, Yim-Bun Patrick Kwan, Bernard Stommen, Herman Soemers +1 more |
2011-09-13 |
| 7868304 |
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Johannes Christiaan Leonardus Franken +1 more |
2011-01-11 |
| 7696492 |
Radiation system and lithographic apparatus |
Arnoud Cornelis Wassink, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Theodorus Petrus Maria Cadee +4 more |
2010-04-13 |
| 7612353 |
Lithographic apparatus, contaminant trap, and device manufacturing method |
Leonid Aizikovitch Sjmaenok, Vadim Yevgenyevich Banine, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Alexander Schmidt +3 more |
2009-11-03 |
| 7602472 |
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device |
Edwin Johan Buis, Erik Theodorus Maria Bijlaart, Christiaan Alexander Hoogendam, Alexander Matthijs Struycken, Arnoud Cornelis Wassink |
2009-10-13 |